Feature

• Integration of blocks and ballscrew nuts enable space-saving.
• The two rows of Gothic-arc groove and contact angle of 45°can simultaneously bear the loading in four directions.

Use

IC・LSI manufacturing machine / hard disk drive / OA equipment slide unit / Wafer transfer device

• Pneumatic pressure enables multi-point high-speed positioning and high-speed movement.
• Soft-start and Soft-stop
• With remote maintenance, remote diagnostics, SMS and pneumatic email warning systems via TCP/IP, the equivalent system to electric actuator can be structured.
• Strength of Pneumatic Servo System
  　(1)Wide load range: 2～300kg
  　(2)High acceleration: MAX 30m/s2 　(3)Less heat affection under 100% duty cycle

Features

• Lineup of Belt-type Slider and Ballscrew-type Slider
• Long Stroke (8500mm)
• High-speed transport (MAX 3000mm/s)
• High thrust (MAX 17KN)

Slider Spec

LA series Screw-type Linear Actuator

Stroke: 50/75/100mm MAX
Thrust: 1kgf
Speed: 13.1 ～ 28.5mm/sec

LC series Belt-type Linear Actuator

Stroke: 300/500/700m MAX
Thrust: 1.0 ～ 4.0kgf
Speed: 5 ～ 360mm/sec

LD series Screw-type Linear Actuator

Stroke: 200/300/400/500mm MAX
Thrust: 1.0 ～ 10.0kgf
Speed: 0.5 ～ 65mm/sec